Particularly precise (6 nm spatial resolution, 2-3 atomic monolayers volume (depth) resolution) identification of surface and volumetric (up to 1-2 μm depth) derivatives, determination of elemental composition, obtainment of chemical (bond) information. Problems and limitations can be found when testing dielectric specimens in particular.
The device is designed to measure elemental and chemical composition (bonds) of various solids (including thin coatings and nano-powders) by X-ray photoelectron spectroscopy (XPS).
