Measurement of elemental composition (and partially chemical information) of nano-level sample surfaces and nano-level derivatives

Service description

Particularly precise (6 nm spatial resolution, 2-3 atomic monolayers volume (depth) resolution) identification of surface and volumetric (up to 1-2 μm depth) derivatives, determination of elemental composition, obtainment of chemical (bond) information. Problems and limitations can be found when testing dielectric specimens in particular.

Application

The device is designed to perform elemental and chemical state analysis of sample surfaces, nano-level derivatives, thin coatings and contact zones by scanning Auger electron spectroscopy and Auger electron microscopy scanning techniques.

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