Equipment is designated for the XPS analysis of various samples (including thin films and nanopowders) for the determination of elemental and chemical composition.
Technical parameters
Base vacuum pressure – <6.7×10-8 Pa (5×10-10 Torr);
Ion gun current up to 5 µA, at 5 kV voltage;
XPS energy resolution for Ag 3d5/2 peak FWHM < 0.50 eV;
XPS energy resolution for PET – O=C-O C 1s peak FWHM < 0.85 eV;
The diameter of scanning X-ray beam from 10 µm up to 300 µm.
